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Single-wafer cleaning equipment
The single-chip cleaning machine is composed of several cleaning chambers, and then each wafer is sent to each chamber for separate spray cleaning by the manipulator. The cleaning effect is better, avoiding cross contamination and contamination of the previous batch after the batch, and has a high p... MORE +
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Batch cleaning equipment
Automatic cleaning equipment is widely used in the field of integrated circuit, advanced packaging in the field of photoresist removal process. Compared with the traditional glue-removing equipment, the degree of automation is higher, using modular design, can be based on customer customized process... MORE +
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